| 发明名称 |
METHOD OF IMPROVING CRYSTALLINITY OF SEMICONDUCTOR COATING BY SCANNING LASER BEAM |
| 摘要 |
A method is disclosed for improving the crystallinity of semiconductor films by scanning the surface of such films with a shaped, focused laser beam. The laser is matched to the film so that the beam delivers sufficient energy thereto to heat the film above a temperature at which crystallization occurs along the scan track. |
| 申请公布号 |
JPS52115681(A) |
申请公布日期 |
1977.09.28 |
| 申请号 |
JP19760148619 |
申请日期 |
1976.12.10 |
| 申请人 |
JIYON SHII SHII FUAN;HAABAATO JIEI ZEIGAA |
发明人 |
JIYON SHII SHII FUAN;HAABAATO JIEI ZEIGAA |
| 分类号 |
H01L31/04;C23C16/22;C23C26/02;C30B1/02;H01L21/20;H01L21/268;H01L31/068;H01L31/07;H01L31/18 |
主分类号 |
H01L31/04 |
| 代理机构 |
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