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经营范围
发明名称
RETICULE
摘要
PURPOSE:To increase mounting accuracy, prevent contamination and further obtain reticules suitable for automation by discriminating positioning and handling of reticules.
申请公布号
JPS52115183(A)
申请公布日期
1977.09.27
申请号
JP19760031208
申请日期
1976.03.24
申请人
HITACHI LTD
发明人
KAGEYAMA NAGAICHIROU
分类号
G03F1/00;G03F1/54;H01L21/027;H01L21/48
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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