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发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPS52114444(A)
申请公布日期
1977.09.26
申请号
JP19760030966
申请日期
1976.03.22
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
MATSUO SEITAROU;TAKEHARA YUMIKO
分类号
H01L21/302;C23F1/00;C23F4/00;H01L21/3065
主分类号
H01L21/302
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代理人
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