ETCHING METHOD OF SEMIIINSULATING FILM,申请号JP19760031564-传众专利搜索

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发明名称	ETCHING METHOD OF SEMIIINSULATING FILM
摘要
申请公布号	JPS52114275(A)	申请公布日期	1977.09.24
申请号	JP19760031564	申请日期	1976.03.22
申请人	SONY CORP	发明人	OKAYAMA MASAKI
分类号	H01L21/308;H01L21/302	主分类号	H01L21/308
代理机构		代理人
主权项
地址

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