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发明名称
METHOD OF POSITIONING A SUBSTRATE WITH RESPECT TO A REFERENCE AXIS
摘要
申请公布号
CA1017430(A)
申请公布日期
1977.09.13
申请号
CA19760268023
申请日期
1976.12.16
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
DOUBEK, EDWARD R. (JR.);KENNEDY, JOHN J.;SANDMORE, DONALD K.
分类号
G01B7/31;G01B11/27;(IPC1-7):G01B11/27
主分类号
G01B7/31
代理机构
代理人
主权项
地址
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