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经营范围
发明名称
IONNSPATTERING APPARATUS
摘要
申请公布号
JPS52108381(A)
申请公布日期
1977.09.10
申请号
JP19760025053
申请日期
1976.03.10
申请人
EIKOO ENJINIARINGU KK
发明人
TAKAHASHI HIROSHI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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