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发明名称
VERFAHREN ZUR BESTIMMUNG DES DONATORGEHALTES VON HOCHREINEM POLYKRISTALLINEM SILICIUM FUER HALBLEITERZWECKE
摘要
申请公布号
DE2608965(A1)
申请公布日期
1977.09.08
申请号
DE19762608965
申请日期
1976.03.04
申请人
WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH
发明人
SCHMIDT,DIETRICH,DIPL.-PHYS.DR.;HUBER,KARL;HOFER,JOHANN
分类号
H01L21/66;C30B13/00;(IPC1-7):B01J17/00
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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