发明名称 Support stand for a corpuscular-beam microscope
摘要 A corpuscular-beam microscope including a support stand, a columnar housing containing the optical elements of the microscope, electronic control and regulating means for generating and transmitting voltage signals to parts of a beam generator of the microscope which are at high-voltage potential, and at least one high-vacuum pump for evacuating the microscope housing. The improvement of the invention comprises the support stand comprising a horizontal base member and a flexure-resistant vertical support member disposed on the base member. The microscope housing, the control and regulating means, and the pump are mounted on different sides of the support member and are arranged so that the center of gravity of the support stand is disposed between the support member and the optical axis of the microscope near the axis.
申请公布号 US4044256(A) 申请公布日期 1977.08.23
申请号 US19760719140 申请日期 1976.08.31
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 KRISCH, BURKHARD;MULLER, KARL-HEINZ;RAUCH, MORIZ VON;VENEKLASEN, LEE H.
分类号 H01J37/26;H01J37/02 主分类号 H01J37/26
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