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经营范围
发明名称
PATTERNING METHOD
摘要
申请公布号
JPS5299774(A)
申请公布日期
1977.08.22
申请号
JP19760016020
申请日期
1976.02.18
申请人
HITACHI LTD
发明人
TERAO MOTOYASU;YONEZAWA SHIGEJI;ITOU YOSHITOSHI
分类号
H01L21/027;H01L21/302
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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