MEASURING APPARATUS FOR LATTICE DEFECTS,申请号JP19760014024-传众专利搜索

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发明名称	MEASURING APPARATUS FOR LATTICE DEFECTS
摘要
申请公布号	JPS5298466(A)	申请公布日期	1977.08.18
申请号	JP19760014024	申请日期	1976.02.13
申请人	HITACHI LTD	发明人	MIYAO MASANOBU;MIYAZAKI TAKAO
分类号	G01N21/27;H01L21/66	主分类号	G01N21/27
代理机构		代理人
主权项
地址

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