发明名称 Method of etching materials including a major constituent of tin oxide
摘要 A method of etching a desired pattern in a layer of material including a major constituent of tin oxide is provided. A film of material which is resistant to the etching action of hot concentrated hydroiodic acid is formed on the layer and patterned. Portions of the layer uncovered by the patterned film are etched with hot concentrated hydroiodic acid.
申请公布号 US4040892(A) 申请公布日期 1977.08.09
申请号 US19760676370 申请日期 1976.04.12
申请人 GENERAL ELECTRIC COMPANY 发明人 SARGENT, PAUL L.;GHEZZO, MARIO
分类号 C09K13/04;G02F1/01;H01L21/3213;H01L31/18;(IPC1-7):C23F1/02 主分类号 C09K13/04
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