发明名称 Apparatus for producing a controlled radial path of resistance in a semiconductor monocrystalline rod
摘要 An apparatus for controlling a radial path of resistance in a semiconductor monocrystalline rod produced by a crucible-free zone melting whereby the material flow path and heat distribution in the melt zone is controlled by a guided stream of protective gas.
申请公布号 US4039283(A) 申请公布日期 1977.08.02
申请号 US19750606854 申请日期 1975.08.22
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 KELLER, WOLFGANG
分类号 C30B13/28;(IPC1-7):B01J17/10 主分类号 C30B13/28
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