Conductive layers formed in insulators - using indirect ion bombardment driving metal atoms. from a foil into insulator

摘要

Conductive layers are produced in insulators by indirect implantation. Atoms creating or contributing to conductivity are driven out of a foil by ion bombardment and into the insulator. Atoms may also be driven into the insulator from a coating bonded to the latter. The ions employed in the bombardment are pref. metal ions and/or ions possessing two ore more charges. The foil or the coating pref. consist of material contg. or made of, one of the elements Be, Mg, Al or Cu. When a coating is used for indirect implantation, it may be sepd. from the insulator substrate by an intermediate layer subsequently removed by a solvent which attacks neither the substrate nor the implanted atoms. Used e.g. to avoid static charges; adjust potential distribution; voltage limitation; or as contacts for electroplated coatings.