APPARATUS FOR COATING WITH THIN FILM,申请号JP19760147931-传众专利搜索

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发明名称	APPARATUS FOR COATING WITH THIN FILM
摘要
申请公布号	JPS5285083(A)	申请公布日期	1977.07.15
申请号	JP19760147931	申请日期	1976.12.10
申请人	IBM	发明人	RICHIYAADO GIRUBAATO KURISUTEN
分类号	C23C14/50;H01L21/285	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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