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发明名称
SEMICONDUCTOR WAFER ACCOMMODATING JIG
摘要
申请公布号
JPS5285476(A)
申请公布日期
1977.07.15
申请号
JP19760001575
申请日期
1976.01.09
申请人
HITACHI LTD
发明人
ISHII SEIICHI
分类号
H01L21/673;H01L21/22;H01L21/68
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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