| 摘要 |
<p>1,259,165. Optical apparatus. BRUNSWICK CORP. Jan.29, 1969 [Jan.30, 1968], No.5016/69. Heading G2J. A method of producing high resolution images comprises forming a collimated hole structure 10 defined by a body having a plurality of substantially rectilinear, parallel through passages 12 extending between spaced surfaces of the body, the passages having a maximum transverse dimension of under 500 microns and having an aspect ratio of at least 5:1, providing on one of said surfaces a mask 16, Fig. 5, defining an opening 15 of pre-selected shape, said opening exposing a plurality of the passages, and passing radiation through the exposed passages to form a plurality of images corresponding accurately to the cross-sections of said passages. The mask 16 may be plated on to the body or may be formed by exposing and developing a photoresist material. The method may be used in micro-circuitry wherein the images are formed on a radiation-resist layer which is then developed and etched. Desirably the maximum transverse dimension of the passages is under 10 microns. Alternatively the mask may be another collimated hole structure. Also if desired the body 10 may have corresponding masks over body end surfaces. The hole structure comprises a composite formed of a metal matrix and a plurality of substantially rectilinear, parallel filaments formed of a different metal which is leached out to form the passages.</p> |
