| 摘要 |
PURPOSE:To make possible of imparting sufficient strength in handling by raising degreasing temperature in an inert atmosphere before burning of an AlN green sheet to specific range and controlling a heating rate below a specific value. CONSTITUTION:A maximum keeping temperature is made as 750-1,500 deg.C and a heating rate from 500 deg.C to the maximum keeping temperature is made as <=50 deg.C/hr in heating the AlN green sheet in an inert atmosphere and degreasing before burning. By said method, the AlN green sheet having sufficient strength without generating warpage nor cracking in handling such as transferring to burning furnace. |
