Apparatus for liquid-phase epitaxial growth,申请号US19750594950-传众专利搜索

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发明名称	Apparatus for liquid-phase epitaxial growth
摘要	An apparatus for liquid-phase epitaxial growth is characterized in that the greater part of that surface of a well, made of carbon, which contacts with a solution for liquid-phase epitaxial growth is covered with a fused quartz layer.
申请公布号	US4033291(A)	申请公布日期	1977.07.05
申请号	US19750594950	申请日期	1975.07.10
申请人	TOKYO SHIBAURA ELECTRIC CO., LTD.	发明人	NAITO, MAKOTO;KAWACHI, MASARU;SEKIWA, TETUO;AKATSUKA, MINORU;KASAMI, AKINOBU;TOYAMA, MASAHARU
分类号	C30B19/06;(IPC1-7):B05C3/09	主分类号	C30B19/06
代理机构		代理人
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