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发明名称
APPARATUS FOR TREATING PIECES UNDER TREATMENT UNDER PRESSUREEREDUCED CONDITION
摘要
申请公布号
JPS5277673(A)
申请公布日期
1977.06.30
申请号
JP19760144072
申请日期
1976.12.02
申请人
IBM
发明人
HAABAATO RORENTSU ARUNTO JIYUNIA;JIYON ROBAATO KURANITSUKU;DEIMETORIOSU BORUDERESU;CHIYAARUZU JIYON RUUKASU
分类号
H01J37/18;H01J37/317
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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