发明名称 FORMATION OF EVAPORATION THIN FILM
摘要 PURPOSE:To decrease the occurence of defect, such as a scar etc., on the evaporated thin film with the earty stage use of crucible, by using evaporation crucible, processed the inner surface to the specific rough surface.
申请公布号 JPS5274579(A) 申请公布日期 1977.06.22
申请号 JP19750137266 申请日期 1975.11.17
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 KOTABE AKIO;TAKAHARA TAKESHI
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址