Multipurpose furnace for ion implantation in metals - for surface treatments including carburizing and quenching

摘要

Multipurpose furnace for a wide range of heat- or thermochemical- treatments, esp. by ion bombardment. The novelty is the use of a stationary furnace using a sealed chamber with a vacuum connection; gas inlets and a fan for circulating treatment or cooling ases; a cathode on which the workpieces are mounted; an anode, which may be consumable; a high voltage supply; heating and/or cooling elements; and a sealed, thermally insulating partition leading, when removed, to a quenching tank. The heating and/or cooling elements pref. consist of a network of resistance and/or a tubular resistance coil which can be fed with electric power, or cooling water or air fed through the coil. The furnace is used e.g. for the ion bombardment of steel or alloy steels. The furnace can be used for nitriding at 600 degrees C; carbonitriding at 850 degrees C; carburising at 920 degrees C; boron treatemtn at 900-1000 degrees C; depositing metals at 1100 degrees C; etc.