发明名称 VERFAHREN ZUM HERSTELLEN EINER HALBLEITERVORRICHTUNG
摘要 <p>The surface insulation and/or the free semi-conductor surface is metallised with aluminium, titanium or polycrystalline silicon. The surface of the metallisation is oxidised pref. at is not >500 degrees C (200 degrees C) at 2-100 atmos for approx. 1 hr. Pref. the oxidising medium in air, O2, steam, N2O N2O3, NO2 or a non-etching liq. (water) esp. one contg. and O2 liberating substance esp. a peroxide such as H2O2 Ce (IV) ions and/or CrO4 ions and/or MnO4 ions contg. material.</p>
申请公布号 DE2555187(A1) 申请公布日期 1977.06.16
申请号 DE19752555187 申请日期 1975.12.08
申请人 SIEMENS AG 发明人 PAMMER,ERICH,DIPL.-CHEM.DR.
分类号 H01L21/316;H01L21/3215;H01L21/768;(IPC1-7):01L21/30 主分类号 H01L21/316
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