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发明名称
FORMATION OF METAL WIRING
摘要
申请公布号
JPS5271980(A)
申请公布日期
1977.06.15
申请号
JP19750147996
申请日期
1975.12.11
申请人
NIPPON ELECTRIC CO
发明人
YAMAJI NOBUYUKI
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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