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发明名称
FORMATION OF OXIDIZATION FILM
摘要
申请公布号
JPS5267268(A)
申请公布日期
1977.06.03
申请号
JP19750143472
申请日期
1975.12.01
申请人
SONY CORP
发明人
HATSUTORI TSUYOSHI
分类号
H01L29/73;H01L21/316;H01L21/322;H01L21/329;H01L21/331
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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开关
