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发明名称
VERFAHREN ZUM HERSTELLEN VON HALBLEITERBAUELEMENTEN
摘要
申请公布号
DE2652253(A1)
申请公布日期
1977.06.02
申请号
DE19762652253
申请日期
1976.11.16
申请人
WESTERN ELECTRIC CO.INC.
发明人
DY YAU,LEOPOLDO
分类号
H01L29/73;G03F7/40;H01L21/027;H01L21/266;H01L21/302;H01L21/3065;H01L21/311;H01L21/331;H01L29/10;H01L29/78;(IPC1-7):H01L21/31
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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