发明名称 |
Photodetector array delineation method |
摘要 |
A novel mask is used to contour the photodetector body and adhesive layer of a photodetector device on a substrate in which the mask apertures define an angle with the plane of the substrate. Air abrasion at that angle removes unwanted portions of the photodetector body and adhesive layer, leaving a contour desirable for subsequent interconnect metallization.
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申请公布号 |
US4027323(A) |
申请公布日期 |
1977.05.31 |
申请号 |
US19760720918 |
申请日期 |
1976.09.07 |
申请人 |
HONEYWELL INC. |
发明人 |
LORENZE, JR., ROBERT V.;YOUNG, MIRIAM F. |
分类号 |
H01L21/304;H01L25/04;H01L31/0352;(IPC1-7):H01L27/14;H01L31/00;C23F1/00;C23G1/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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