发明名称 PRODUCTION OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To facilitate the formation of multilayer wirings by opening holes in the SiO2 film formed on a semiconductor substrate, forming a first wiring layer therein, then depositing an SiO2 film of nearly the same thickness as that of a silica film and wiring layer on the entire surface and forming thereon a second wiring layer after removing the raised portions.
申请公布号 JPS5261981(A) 申请公布日期 1977.05.21
申请号 JP19750138458 申请日期 1975.11.18
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 KOTANI SHIGEO;MOTOJIMA MASATOSHI
分类号 H05K3/46;H01L21/3205;H05K3/00 主分类号 H05K3/46
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