发明名称 |
MASK STRUCTURE FOR X-RAY LITHOGRAPHY |
摘要 |
<p>A mask structure for use in an x-ray lithographic system comprises as the substrate thereof a Mylar film stretched over and bonded to a support ring. The stretched Mylar film exhibits an attractive combination of advantageous properties such as high planarity, dimensional stability, mechanical strength, low x-ray absorption, resistance to organic solvents, optical transparency, and ready availability in a variety of thicknesses with optical quality surfaces.</p> |
申请公布号 |
CA1010578(A) |
申请公布日期 |
1977.05.17 |
申请号 |
CA19740213950 |
申请日期 |
1974.11.18 |
申请人 |
WESTERN ELECTRIC COMPANY, INCORPORATED |
发明人 |
COQUIN, GERALD A.;MALDONADO, JUAN R.;MAYDAN, DAN |
分类号 |
H01L21/027;G03F1/22;G03F1/48;H01L21/30 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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