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发明名称
LIQUID PHASE EPITAXIAL DEVICE
摘要
申请公布号
JPS5258361(A)
申请公布日期
1977.05.13
申请号
JP19750133774
申请日期
1975.11.07
申请人
SONY CORP
发明人
AYABE MASAAKI
分类号
H01L29/73;C30B19/06;H01L21/208;H01L21/331;H01S5/00
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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