| 发明名称 |
CLEARANCE ADJUSNG METHOD |
| 摘要 |
PURPOSE:To adjust the clearance between a transparent object which reflects light to a certain degree and a reflectable transparent or opaque object by using light without causing surface damaging and eliminate the occurrence of errors which are based on diffraction phenomenon. |
| 申请公布号 |
JPS5252579(A) |
申请公布日期 |
1977.04.27 |
| 申请号 |
JP19750129104 |
申请日期 |
1975.10.27 |
| 申请人 |
CANON KK |
发明人 |
TANAKA NOBUYOSHI;TAKEDA MITSUO;MATSUMOTO KAZUYA |
| 分类号 |
G03B27/32;G01B9/02;G01B11/14;G03B27/00;H01L21/027;H01L21/68 |
主分类号 |
G03B27/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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