| 发明名称 |
PROCESS FOR PRODUCTION OF SLIDER |
| 摘要 |
PURPOSE:To form floating grooves in an Si substrate serving also as a slider, by photoetching, thereby preventing damaging and improving working accuracy. |
| 申请公布号 |
JPS5250711(A) |
申请公布日期 |
1977.04.23 |
| 申请号 |
JP19750126387 |
申请日期 |
1975.10.22 |
| 申请人 |
HITACHI LTD |
发明人 |
TAMURA TSUYOSHI;KAEN MASANOBU;ASAI OSAMU |
| 分类号 |
G11B5/60;C23F1/00;G11B5/31 |
主分类号 |
G11B5/60 |
| 代理机构 |
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代理人 |
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| 地址 |
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