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发明名称
摘要
申请公布号
DD125474(A6)
申请公布日期
1977.04.20
申请号
DD19760192180
申请日期
1976.04.02
申请人
发明人
分类号
C30B13/10;H01L21/208;(IPC1-7):B01J17/10
主分类号
C30B13/10
代理机构
代理人
主权项
地址
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