发明名称 Method and means for passivation and isolation in semiconductor devices
摘要 The use of ion implantation to produce low concentrations of chromium, oxygen or iron in a gallium arsenide junction type semiconductor, utilizing the accompanying low resistivity to provide an improved device.
申请公布号 US4017887(A) 申请公布日期 1977.04.12
申请号 US19740535062 申请日期 1974.12.20
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE 发明人 DAVIES, D. EIRUG;ROOSILD, SVEN A.;DOLAN, JR., RUSSELL P.
分类号 H01L21/263;H01L21/265;H01L29/207;(IPC1-7):H01L29/34;H01L27/04;H01L29/16 主分类号 H01L21/263
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