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发明名称
ETCHING PROCESSOR
摘要
申请公布号
JPS5242378(A)
申请公布日期
1977.04.01
申请号
JP19750118654
申请日期
1975.09.30
申请人
IWASAKI TSUSHINKI KK
发明人
KAKITOU AKIRA;YASUI JIYUNICHI;KOGANEI YOUJI
分类号
B41F7/20;B41N3/08;C23F1/08;G03F7/30
主分类号
B41F7/20
代理机构
代理人
主权项
地址
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