发明名称 METHOD AND DEVICE FOR DEPOSITING A DOPED MATERIAL BY EPITAXIAL GROWTH
摘要 <p>The method comprises the deposition of at least one layer of doped material on a heated substrate (6) placed into a housing (2) by subjecting the surface of the substrate (6) to the action of a molecular beam (130 of material (16), to the action of a beam of doping particles (25) and to the action of a beam of electrons (28).</p>
申请公布号 WO1986005319(A1) 申请公布日期 1986.09.12
申请号 FR1986000048 申请日期 1986.02.19
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