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发明名称
COLLECTOR OF CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPS5240300(A)
申请公布日期
1977.03.29
申请号
JP19750115764
申请日期
1975.09.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
TANO MASAHIRO;YABUNAKA FUMIHARU;MANABE MASARU
分类号
G21K5/00;G21K1/00
主分类号
G21K5/00
代理机构
代理人
主权项
地址
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