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发明名称
PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5236975(A)
申请公布日期
1977.03.22
申请号
JP19750112809
申请日期
1975.09.18
申请人
FUJITSU LTD
发明人
KIYO HIDEO;ITOU MAKOTO
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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