发明名称 |
Uniform thermal migration utilizing noncentro-symmetric and secondary sample rotation |
摘要 |
The geometric configuration of a molten zone migrating through a solid body of semiconductor material during thermal gradient zone melting is maintained by simultaneous noncentro-symmetric and secondary rotation of the solid body.
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申请公布号 |
US4012236(A) |
申请公布日期 |
1977.03.15 |
申请号 |
US19750645675 |
申请日期 |
1975.12.31 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
ANTHONY, THOMAS R.;CLINE, HARVEY E. |
分类号 |
H01L21/208;C30B13/02;H01L21/24;(IPC1-7):H01L21/22 |
主分类号 |
H01L21/208 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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