发明名称 Uniform thermal migration utilizing noncentro-symmetric and secondary sample rotation
摘要 The geometric configuration of a molten zone migrating through a solid body of semiconductor material during thermal gradient zone melting is maintained by simultaneous noncentro-symmetric and secondary rotation of the solid body.
申请公布号 US4012236(A) 申请公布日期 1977.03.15
申请号 US19750645675 申请日期 1975.12.31
申请人 GENERAL ELECTRIC COMPANY 发明人 ANTHONY, THOMAS R.;CLINE, HARVEY E.
分类号 H01L21/208;C30B13/02;H01L21/24;(IPC1-7):H01L21/22 主分类号 H01L21/208
代理机构 代理人
主权项
地址