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发明名称
VERFAHREN ZUR HERSTELLUNG VON MONOLITHISCH INTEGRIERTEN HALBLEITERSCHALTUNGEN MIT HERABGESETZTER STREUKAPAZITAET
摘要
申请公布号
DE2637310(A1)
申请公布日期
1977.03.10
申请号
DE19762637310
申请日期
1976.08.19
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
MICHAEL QUINN,ROBERT;JOHN SCHUELE,WILLIAM;ALAN UNIS,RICHARD
分类号
H01L21/76;H01L21/225;H01L21/8247;H01L27/07;H01L29/06;H01L29/40;H01L29/788;H01L29/792;(IPC1-7):H01L21/72
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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