摘要 |
The device comprises a fabric (10) to which the material can adhere and which is fixed to the inner wall (8) of the source (2). In order to recover a metal, it is possible to use a refractory oxide fabric, to heat this fabric to which this metal adheres, in an atmosphere which is chemically inert with respect to this metal, so as to melt the metal, and to recover the metal thus liquefied. Application to plasma depositions. <IMAGE> |