| 摘要 |
<p>1420062 Discharge apparatus TELIC CORP 4 Sept 1972 [7 Sept 1971 18 May 1972] 10140/75 Divided out of 1420061 Heading H1D A cathode structure for use in electrode glow discharge apparatus comprises a cathode assembly 14 including a central elongated portion 40, flange members 14a, 14b at the ends thereof, and means 59 coupling together said central portion and said flange members, said flange members and central portion together providing a cavity therein, and a spool 76 mounted within said cathode assembly, said spool having a central elongated portion 77 mounted within the central portion 40 of said cathode assembly and having wing portions 77a and 77b mounted within the respective flange members 14a and 14b of said cathode assembly. The cathode structure is secured by supporting means 15 to the cover 18 of a sputtering apparatus described in the Parent Specification in association with a hollow water-cooled anode 16. The supporting means 15 include passages for circulating cooling water through the cathode assembly. The latter includes a magnet coil 20, and a further magnet coil (not shown) is mounted around the wall of the apparatus.</p> |
