| 摘要 |
A system for handling plate like objects (e.g., semiconductor wafers) includes a gas actuated fixture having a surface for releasably picking up the plate like objects (e.g., by Bernoulli effect). Means is provided for moving the pickup fixture in a plane of motion from a first to second position. Means forming a part of the pickup fixture (e.g., a selectively pressured bellows) moves the pickup surface orthogonally to the plane of motion. An air track or other conveyer for the plate like objects includes means for restraining the objects beneath the first position. Means for positioning successive locations of a carrier for the plate like objects positions the successive locations beneath the second position. In operation, the system picks up the plate like objects from the conveyer, loads them onto the carrier, then unloads them from the carrier and returns them to the conveyer, all without subjecting the objects to human contamination.
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