| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy in angular velocity detection by converting a displacement signal generated by a detection means for detecting y-direction displacement of a second movable body into an angular velocity signal. SOLUTION: In order to make a float react with angular velocity around a Z-axis, a first float 2 is excited only in an x-direction, a second float 3 is made to be able to vibrate only in a y-direction to obtain an angular velocity corresponding signal, and the first float 2 and the second float 3 are coupled via a third float I. The third float I is movable in x- and y-directions with respect to a substrate 1, only in the y-direction with respect to the first float 2, and only in the x-direction with respect to the second float 3. Since the first float 2 is substantially immobile in the y-direction, it may not be displaced substantially in the y-direction even if driving force in the y-direction for example is applied due to x-direction excitation driving, while the third float I and the second float 3 are not driven in the y-direction by the x-direction excitation driving and may not shift a displacement signal when no angular velocity is applied. Thus accuracy in angular velocity detection is improved. |
