发明名称 Double grooved boat for semiconductor compound mfr. - by vapour liquid reaction, giving improved yield
摘要 <p>Method of growing a semiconductor compound esp. GaP. in the form of an ingot comprises a reaction synthesis in a sealed chamber by reacting a first volatile component having a vapour pressure at least equal to the dissociation pressure of the cpd., with a second component in the liquid phase in a elongated boat in horizontal position. The closed chamber is heated by radiant heat. The excess of liquid component appearing during the course of the reaction, representing the excess of liquid over the amount of cpd. obtd. is removed continuously during the course of the reaction. The height of the ingot as it grows in the boat remains constant unlike in prior art methods, hence the profile of the temperature gradient does not change during the reaction and the yield is improved.</p>
申请公布号 FR2318677(A1) 申请公布日期 1977.02.18
申请号 FR19730024696 申请日期 1973.07.05
申请人 RADIOTECHNIQUE COMPELEC 发明人 GUY JACOB
分类号 C30B11/12;(IPC1-7):01J17/00 主分类号 C30B11/12
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