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发明名称
DIFFUSION OF IMPURITIES INTO SEMICONDUCTOR SUBSTRATES
摘要
申请公布号
GB1464734(A)
申请公布日期
1977.02.16
申请号
GB19740036855
申请日期
1974.08.22
申请人
IBM CORP
发明人
分类号
C30B31/02;H01L21/225;H01L21/316;H01L21/322;H01L29/00;(IPC1-7):H01L21/38
主分类号
C30B31/02
代理机构
代理人
主权项
地址
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