| 摘要 |
<p>An SAW device restricted in electrical characteristic deterioration and excellent in moisture resistance. Many SAW elements each having an IDT electrode mainly containing aluminum are formed on a piezoelectric substrate. Then the piezoelectric substrate is immersed in a solution containing phosphorus ions, pulled up, washed with water and dried. Frequency characteristics of respective SAW elements are then measured for screening, and the piezoelectric substrate is divided into individual SAW elements. Next, a SAW element is mounted to a package and they are connected with a wire. The opening in the package is sealed with a lid.</p> |
