ELECTROSTATIC CHUCK

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck whose film on a ceramic dielectric portion related to an electrostatic attraction power is thinner and fine compared to the conventional one and is superior in a thermal conductivity, abrasion resistance, corrosion resistance and stain resistance. SOLUTION: An aluminum oxide dielectric layer with high purity and having a volume specific resistivity of 108-1013 ohms cm or 1010-1013 ohm cm is formed on a substrate arranged electrodes thereon by an ultrafine particle beam deposition method.