LAMINATED ONE-BODY BAKED TYPE ELECTROMECHANICAL CONVERSION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a laminated one-body baking type electromechanical conversion element, having the same or more electrode characteristics than that of Ag-Pd-based electrode, especially having a low rigidity of the inner electrode layer and small inner stress generated at expansion or shrinkage of a ceramic layer, while using a low-cost electrode material. SOLUTION: The laminated one-body baking type electromechanical conversion element includes a laminate, in which a plurality of ceramic layers 11 made of piezoelectric ceramics or of electrostriction ceramics, and inner electrode layers 21 and 22 between the ceramic layers 11 are baked. The inner electrode layers 21 and 22 contain base metal with modulus of rigidity of 160 GPa or lower as a main component.