| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion apparatus having an effective means for removing an immersion liquid from a surface. <P>SOLUTION: A gas knife configured to dry the surface in an immersion lithographic apparatus is optimized to remove the liquid by ensuring that a pressure gradient is built up in a liquid film on the surface being dried. <P>COPYRIGHT: (C)2010,JPO&INPIT |
