| 摘要 |
PURPOSE:To reduce the possibility of misoperation by providing a control means which makes invisible an action command of a high order access right level and an action parameter via a display means. CONSTITUTION:A control part 33 consists of a microprocessor, a RAM, an I/O interface, etc., and performs its processing based on the program transferred to the RAM from a disk 34 at the time of applying a power supply. Then a user name inputted by a user via a key is collated with the pass words which are successively read out of a 2nd storage part at the beginning of operation exerted on a semiconductor manufacturing equipment. Thus an access right level of the user is decided to the device. At the same time, an action command exectable to the user and an action parameter settable to the user are limited to the value lower than the access right level of the user by reference to a 1st storage part. Thus the action commands and action parameters of higher access right levels are made invisible via a CRT 32. In such constitution, the misoperations are surely prevented with the semiconductor manufacturing equipment. |
